2407. An Optimization Model and Approximate Dynamic Programming Algorithms for a Wafer-Lot Scheduling Problem in Parallel Multi-Chamber Equipment
Invited abstract in session WA-12: Batch scheduling, stream Scheduling and Project Management.
Wednesday, 8:30-10:00Room: Clarendon SR 1.02
Authors (first author is the speaker)
| 1. | Sungwon Hong
|
| Industrial Engineering, Seoul National University | |
| 2. | Younsoo Lee
|
| Industrial and Information Systems Engineering, Soongsil University | |
| 3. | Kyungsik Lee
|
| Industrial Engineering, Seoul National University |
Abstract
In this talk, we address the wafer-lot scheduling problem (WLSP) for parallel multi-chamber equipment in semiconductor wafer fabrication lines. The equipment can process multiple wafers simultaneously, with each chamber handling one wafer at a time. Each wafer lot requires a specific process step, with target production quantities assigned for each step. The goal of the WLSP is to maximize the fulfillment of these target quantities within the planning horizon while adhering to operational constraints. We present a mixed-integer programming model based on a two-level tour structure along with valid inequalities to strengthen the linear programming relaxation bounds of the model. In addition, we propose approximate dynamic programming algorithms that incorporate several upper and lower bounding methods. Computational results show that the proposed algorithms can provide high-quality solutions within a short time for practically sized instances.
Keywords
- Scheduling
- Programming, Mixed-Integer
- Programming, Dynamic
Status: accepted
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