EURO 2024 Copenhagen
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2203. Scheduling on parallel metrology tools for risk minimization

Invited abstract in session WA-60: Manufacturing scheduling with sustainability considerations, stream Project Management and Scheduling.

Wednesday, 8:30-10:00
Room: S09 (building: 101)

Authors (first author is the speaker)

1. mathis martin
SFL, Ecole des Mines de Saint-Etienne
2. Claude Yugma
Centre Microélectronique de Provence- Georges Charpak, Ecole Nationale Supérieure des Mines de Saint-Etienne
3. Stéphane DAUZERE-PERES
Manufacturing Sciences and Logistics, Ecole des Mines de Saint-Etienne - LIMOS

Abstract

In semiconductor manufacturing, product reliability and quality are crucial, especially for critical applications such as automotive or robotics. Hence, the outputs of production machines are measured through control operations performed by metrology (measurement) tools. As these tools become increasingly expensive, optimizing their use to minimize the risk is essential .
Risk indicators can be used to prioritize lots in metrology. This work relies on the "Wafers at Risk" (W@R), which is the number of lots processed on a production machine between two lots that are measured. Each lot selected to be measured induces a gain (risk reduction) on the W@R of each of the production machines on which the lot was processed, and the earlier the lot is measured, the earlier the gains are obtained. In this presentation, we introduce a scheduling problem on parallel machines where the total risk reduction over time is maximized. Compared to classical parallel machine scheduling problems, computing the criterion requires to consider how the W@R of all production machines evolve when lots are measured on all metrology tools. To ensure the synchronization between metrology tools, time-indexed binary variables are required in the mathematical model of the problem. Various solution methods have been proposed, including a column generation approach, a greedy heuristic, and a Greedy Randomized Adaptive Search Procedure (GRASP). Numerical results will be presented in the conference.

Keywords

Status: accepted

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